SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host.
SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) is communication interface protocols for communication between semiconductor equipment and a fab host. Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-I).