The SECS/GEM is the semiconductor's equipment interface protocol for equipment-to-host data communications. In an automated fab, the interface can start and stop equipment processing, collect measurement data, change variables and select recipes for products. The SECS (SEMI Equipment Communications Standard)/GEM (Generic Equipment Model) standards do all this in a defined way.
Unitronics PLCs and the SECS/GEM interface
in Vision & Samba PLC + HMI Controllers & VisiLogic Software
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Secs/Gem open source for windows and linux in C++
http://fatalfeel.blogspot.tw/2013/09/secsgem-open-source.html