ostinedhil Posted July 31, 2014 Report Share Posted July 31, 2014 Hello, Recently, I've started to work on automatization of Chemical Vapor Deposition (CVD) equipment. I know that it is possible to control both the pressure and temperature values during the process using PLC and VisiLogic software. However, one of my goals is also to control the MFCs using PLC, During the process I use 4 different MFCs which are controlled by additional controllers, acctually 4 MFCs and for additional controllers. I would like to control all of the MFCs from one PLC. The types of MFCs I use are: 1. FUJIKIN FCST 1005 (M)L, 2. HORIBA SEC 400MK3, 3. HORIBA SEC E40MK3. In addition, all the controllers are calibrated for different gases argon, acetylene, hydrogen and helium, and also for different flows. So my question in the end is: Is it possible to control those MFCs using Unitronics PLCs? And if yes, what functions/block I should use in VisiLogic Software? Thanks for reply. Quote Link to comment Share on other sites More sharing options...
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